Magnetron sputtering: a review of recent developments and applications magnetron the plasma is strongly conned to the target. I linköping studies in science and technology licentiate thesis no 1470 magnetron sputter epitaxy of gan muhammad junaid liu-tek-lic-2011:9 thin film physics division. Magnetron sputtering applied to the deposition magnetron sputtering applied to the deposition of siucon-rich silicon the technique of magnetron sputtering is. I design, construction, and optimization of a magnetron sputtering system for urania deposition by david joseph gennardo thesis submitted in partial fulfillment of. An abstract of the thesis of impurity e ect on magnetism of nickel for under bump metallization via magnetron sputtering abstract approved: milo d koretsky.
Reactive dc magnetron sputtering of ultrathin superconducting niobium nitride films by andrew e dane abstract: dc reactive magnetron sputtering was used to deposit. Fundamentals of high power impulse the work presented in this thesis involves plasma v “investigation of high power impulse magnetron sputtering pretreated. Design, construction and characterisation of a variable balance magnetron sputtering system the main consideration of this thesis will be the glow discharge. 1 development of low temperature alpha alumina coatings by ac magnetron sputtering a thesis submitted in partial fulfillment of the requirements for the honors.
Synthesis and characterization of cualo2 thin films by reactive rf magnetron sputtering by martín antonio asmat uceda a thesis submitted in partial fulfillment of. Linköping studies in science and technology licentiate thesis no 1344 reactive magnetron sputter deposition and characterization of thin films from the. Publications thesis effect of pulsing parameters on the pulsed closed field unbalanced magnetron sputtering of chromium aluminum nitride coatings used.
Growth, characterization and luminescence and optical properties of rare-earth elements and transition metals doped in wide bandgap nitride semiconductors. Characterization of rf and dc magnetron reactive sputtered tio2 thin films for gas sensors r yordanova, s boyadjieva,b with the same sputtering power.
Growth characterization of rf magnetron sputtered bifeo 3 on epitaxial srtio 3 thesis presented to the graduate council of texas state university-san marcos. Antistatic applications: metal coated fibers by magnetron sputtering a thesis submitted to the graduate school of engineering and sciences of. I declare that ao the unreferred work described in this thesis is entirely magnetron sputtering of thin nitride films by magnetron sputtering as a thin film.